2 February 1988 Modeling Of Nodular Defects In Thin Films For Various Deposition Techniques.
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Abstract
The nodule has been successfully simulated for vapor deposition techniques by a modified hard-disk model. The influence of model parameters on nodule growth is more thoroughly explored in this paper. Also, by making minor changes in the model, simulations of amorphous film and sputtered film are considered. The model is compared with experimental results.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Douglas J. Smith, "Modeling Of Nodular Defects In Thin Films For Various Deposition Techniques.", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941849; https://doi.org/10.1117/12.941849
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