Structure-Zone Models Of Thin Films

John A. Thornton

doi:10.1117/12.941846

2 February 1988 Structure-Zone Models Of Thin Films

John A. Thornton

Proceedings Volume 0821, Modeling of Optical Thin Films; (1988) https://doi.org/10.1117/12.941846
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Structure zone models based on examinations of thin films using optical and scanning microcopy have provided useful guide-lines in categorizing general regimes of film growth behavior. However, many observations have been made since the original zone model for evaporated coatings was proposed by Movchan and Demichishin in 1962 and extended to magnetron sputtering in 1974. The purpose of this paper is to revisit the structure zone models and their physical interpretation in the light of recent experimental and computer simulation observations.

Citation Download Citation

John A. Thornton "Structure-Zone Models Of Thin Films", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); https://doi.org/10.1117/12.941846

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