Paper
19 January 1988 Raman Spectroscopy Of Polycrystalline Diamond Films
Linda S. Plano, Fran Adar
Author Affiliations +
Abstract
Raman spectroscopy has been used to analyze thin (2000-5000A), polycrystalline diamond films. Specifically, this technique was used to distinguish diamond films from those with some percentrage of non-diamond bonding. It was also compared with electron diffraction as a characterization method. Laser induced changes in the films are discussed.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Linda S. Plano and Fran Adar "Raman Spectroscopy Of Polycrystalline Diamond Films", Proc. SPIE 0822, Raman and Luminescence Spectroscopy in Technology, (19 January 1988); https://doi.org/10.1117/12.941935
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Diamond

Raman spectroscopy

Plasma enhanced chemical vapor deposition

Crystals

Hydrogen

Diffraction

Plasma

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