Sputter-Deposited Thin Films Of Linbo[sub]3[/sub] And LiTaO[sub]3[/sub] For The Ion Conducting Layer Of Smart Windows

T. E Haas; R. B. Goldner; G. Seward; K. K. Wong; G. Foley; R. Kabani

doi:10.1117/12.941871

12 November 1987 Sputter-Deposited Thin Films Of Linbo₃ And LiTaO₃ For The Ion Conducting Layer Of Smart Windows

T. E Haas, R. B. Goldner, G. Seward, K. K. Wong, G. Foley, R. Kabani

Proceedings Volume 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI; (1987) https://doi.org/10.1117/12.941871
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Some of the materials properties required for successful use in electrochromic windows are reviewed. The preparation of thin films of lithium niobate and lithium tantalate by rf sputtering is described. The films are shown to be amorphous to X-rays, and transparent to visible and NIR radiation. The sputtering process on substrates of tungsten trioxide leads to the formation of the lithium tungsten bronze. Estimates of the electronic resistivity and conuctivity are given as 10¹²Ω-cm and 10^-7(Ω-cm)^-1.

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T. E Haas, R. B. Goldner, G. Seward, K. K. Wong, G. Foley, and R. Kabani "Sputter-Deposited Thin Films Of Linbo₃ And LiTaO₃ For The Ion Conducting Layer Of Smart Windows", Proc. SPIE 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI, (12 November 1987); https://doi.org/10.1117/12.941871

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