9 August 1988 Development Of A Precision Diamond Cutting Machine For Fabrication Of Asymmetrical Aspheric Mirrors
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Abstract
A high-precision, numerically controlled, diamond cutting machine has been developed for fabrication of asymmetrical aspheric mirrors, such as toroidal mirrors used in SOR optics. In this machine, a work-piece is securely fixed to a machine base, and its side face is cut by a flying single-point diamond tool. A tool spindle is laid on an X-Y slide, and its position is numerically controlled by using a laser interferometer. It is possible to fabricate a cylindrical surface by having the spindle-axis rotate slightly about an axis perpendicular to the X-Y slide. Furthermore, while the spindle is rotating, cutting-depth can be dynamically controlled by utilizing a piezo-actuator fixed to the diamond tool. The cutting-depth control is synchronized to the current rotation angle of the spindle, and cutting-depth data are numerically programmed as function of X-Y slide position. A suitable combination of these programmable figure parameters allows fabrication of asymmetrical aspheric mirrors. In order to achieve high figure accuracy, accurate straight motion is required with the X-Y slide. Therefore, straightness error compensation control is adopted, which incorporates a ZERODURE straightedge of 1m length and three optical-fiber gap sensors. The machine accepts a work-piece with maximum dimensions of 600mm length and 100mm width. A figure accuracy of 0.1 μm and surface roughness of 0.03μmRmax have been achieved.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shigeo Moriyama, Shigeo Moriyama, Fumihiko Uchida, Fumihiko Uchida, Eiichi Seya, Eiichi Seya, } "Development Of A Precision Diamond Cutting Machine For Fabrication Of Asymmetrical Aspheric Mirrors", Proc. SPIE 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications, (9 August 1988); doi: 10.1117/12.942168; https://doi.org/10.1117/12.942168
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