9 August 1988 Interferometry On Grazing Incidence Optics
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A preliminary interferometric procedure is described showing potential for obtaining surface figure error maps of grazing incidence optics at normal incidence. The latter are found in some laser resonator configurations, and in Wolter type X-ray optics. The procedure makes use of cylindrical wavefronts and error subtraction techniques over subapertures. The surface error maps obtained will provide critical information to opticians in the fabrication process.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph Geary, Joseph Geary, Riki Maeda, Riki Maeda, } "Interferometry On Grazing Incidence Optics", Proc. SPIE 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications, (9 August 1988); doi: 10.1117/12.942191; https://doi.org/10.1117/12.942191

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