Picosecond Pulse Response From Hydrogenated Amorphous Silicon (A-Si:H) Optical Detectors On Channel Waveguides

Donald R. Larson; Robert J. Phelan Jr.

doi:10.1117/12.942324

10 March 1988 Picosecond Pulse Response From Hydrogenated Amorphous Silicon (A-Si:H) Optical Detectors On Channel Waveguides

Donald R. Larson, Robert J. Phelan Jr.

Author Affiliations +

Proceedings Volume 0835, Integrated Optical Circuit Engineering V; (1988) https://doi.org/10.1117/12.942324
Event: Cambridge Symposium on Fiber Optics and Integrated Optoelectronics, 1987, Cambridge, MA, United States

Abstract

We have fabricated high speed optical detectors on channel waveguides formed by both potassium ion-exchange in glass and titanium diffusion in lithium niobate. These new waveguide detectors show response times of 200 ps full width at half maximum amplitude (FWHM) when illuminated with subpicosecond optical pulses. The detectors consist of back-to-back Schottky photodiodes formed by chromium-gold metal contacts on hydrogenated amorphous silicon (a-Si:H). When interdigitated metal contacts with the contact separation and semiconductor film thickness dimensions close to one micrometer are used, the detectors are both fast and efficient.

Citation Download Citation

Donald R. Larson and Robert J. Phelan Jr. "Picosecond Pulse Response From Hydrogenated Amorphous Silicon (A-Si:H) Optical Detectors On Channel Waveguides", Proc. SPIE 0835, Integrated Optical Circuit Engineering V, (10 March 1988); https://doi.org/10.1117/12.942324

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