Temperature Measurement Utilizing Hydrogenated Amorphous Silicon Films

L.C. Guedes Valente; S. S Camargo; E. A. Soares

doi:10.1117/12.942514

23 March 1988 Temperature Measurement Utilizing Hydrogenated Amorphous Silicon Films

L.C. Guedes Valente; S. S Camargo; E. A. Soares;

Author Affiliations +

Proceedings Volume 0838, Fiber Optic and Laser Sensors V; (1988) https://doi.org/10.1117/12.942514
Event: Cambridge Symposium on Fiber Optics and Integrated Optoelectronics, 1987, Cambridge, MA, United States

Abstract

In this work the feasibility of utilizing hydrogenated amorphous silicon (a-Si:H) films in optical fiber temperature sensors is demonstrated. In this sensor, a-Si:H films are deposited from the glow discharge decomposition of silane gas directly on fiber ends, followed by an aluminum layer obtained by vacuum evaporation. In this manner, the a-Si:H acts like a low-pass filter which cut-off frequency is temperature dependent, modulating the light intensity wich is reflected back into the fiber. This arrangement provides excelent mechanical rigidity and minimum dimensions, limited only by the fiber diameter. Preliminary results, using films deposited at 250°C and a HeNe laser as light source, showed a linear 50% variation in the detected signal, for a 50° C to 200°C temperature variation. In order to obtain similar effects for a 0.8μm LED, thermal annealed films are used.

Citation Download Citation

L.C. Guedes Valente, S. S Camargo, E. A. Soares, "Temperature Measurement Utilizing Hydrogenated Amorphous Silicon Films", Proc. SPIE 0838, Fiber Optic and Laser Sensors V, (23 March 1988); doi: 10.1117/12.942514; https://doi.org/10.1117/12.942514

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