19 October 1987 XeCl Excimer Laser For Micro - Machining Of Materials: Preliminary Theoretical And Experimental Works.
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Proceedings Volume 0859, Laser Technology II; (1987) https://doi.org/10.1117/12.943372
Event: Second Symposium on Laser Technology, 1987, Warsaw, Poland
Abstract
The paper presents the results of preliminary investigations, both theoretical and experimental, of XeC1 excimer laser pumped by transverse electric discharge with UU preionization. The medium was a mixture of gases He-Xe-HC1. A theoretical model of the XeC1 laser was worked out and a lot of laser parameters calculations were done. In the same time an excimer laser operating on the mixture He-Xe-HC1 was started, the generation of laser radiation was of energy about 20mJ.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leszek Iwanejko, Ludwik Pokora, Miroslaw Stefanski, Zbigniew Ujda, "XeCl Excimer Laser For Micro - Machining Of Materials: Preliminary Theoretical And Experimental Works.", Proc. SPIE 0859, Laser Technology II, (19 October 1987); doi: 10.1117/12.943372; https://doi.org/10.1117/12.943372
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