A New Approach To 3-D Surface Texture Assessment On The Scanning Electron Microscope (Sem)

A. F. Rashed; M. G. El-Sherbiny; H. M.N Falemban

doi:10.1117/12.943494

1 June 1988 A New Approach To 3-D Surface Texture Assessment On The Scanning Electron Microscope (Sem)

A. F. Rashed, M. G. El-Sherbiny, H. M.N Falemban

Proceedings Volume 0863, Industrial Optoelectronic Measurement Systems Using Coherent Light; (1988) https://doi.org/10.1117/12.943494
Event: 1987 Symposium on the Technologies for Optoelectronics, 1987, Cannes, France

Abstract

The scanning electron microscope (SEM) JSM-T300 was modified to give an outiput signal of the average line signal display of any surface to a resolution of about 10A, which is in reality an average three-dimensional representation of the surface topography. The output signal was recorded and analyzed by an FFT narrow band spectrum analyzer coupled to HP disktop computer, for which a computer program based on a frequency spectrum analysis was developed for surface texture assessment , the computation of its different parameters; Ra, Rq, Rz,etc..... Two standard test specimens were used to calibrate the SEM measurements at any speci-fic operating conditions. Machined brass test specimens were made to give a wide range of surface finish of Ra range of 1.5 to 59 μm, and then used to correlate the SEM results with those obtained by the conventional stylus-tracing equipment such as Surtronic-3, and Talysurf-5 of RTH. The correlation was accomplished between the different parameters of the surface texture stylus-traced profiles "across + along" the lay of the tested surfaces and the corresponding parameters of the profile of the average line signal display of SEM. The results obtained were found to be in very good correlation and the small diffe-rences found are attributed to the influence of the micrometerology of the high resolution SEM. The technique adopted for SEM micrometerology could be classified as an automated procedure for the three-dimensional assessment of surface texture.

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A. F. Rashed, M. G. El-Sherbiny, and H. M.N Falemban "A New Approach To 3-D Surface Texture Assessment On The Scanning Electron Microscope (Sem)", Proc. SPIE 0863, Industrial Optoelectronic Measurement Systems Using Coherent Light, (1 June 1988); https://doi.org/10.1117/12.943494

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KEYWORDS

Scanning electron microscopy

Radium

Calibration

Electron microscopes

Surface finishing

Metals

Software

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