1 June 1988 Surface Micro-Topography By Automatic Processing Of Projected Interference Fringes
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Proceedings Volume 0863, Industrial Optoelectronic Measurement Systems Using Coherent Light; (1988) https://doi.org/10.1117/12.943492
Event: 1987 Symposium on the Technologies for Optoelectronics, 1987, Cannes, France
Abstract
Micro-topographic analysis of surfaces, particularly of the non-optical type are of great interest in various areas of science and technology. A technique and results on topographic mapping of surfaces are presented. Essentially, the method uses advanced software for image processing of the pattern of the contouring fringes resulting on the surface from illumination by collimated interference fringes. Inherent noise inconvenients are overcome by specially conceived algorithms leading to a best fit symbolic fringe pattern (ideal contouring fringes). From the topological map, statistical parameters are evaluated to characterize the surface. These include: range and distribution of surface heights, average roughness and the auto-correlation function of the surface.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. W. Wygant, R. W. Wygant, S. P. Almeida, S. P. Almeida, O. D.D. Soares, O. D.D. Soares, } "Surface Micro-Topography By Automatic Processing Of Projected Interference Fringes", Proc. SPIE 0863, Industrial Optoelectronic Measurement Systems Using Coherent Light, (1 June 1988); doi: 10.1117/12.943492; https://doi.org/10.1117/12.943492
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