A Study Of Porous Cordierite As A Potential Candidate For VLSI Dielectric Substrates

R G Thompson; J Shyu; J C Poret; C Buckhalt; D L Shealy; H T Tohver

doi:10.1117/12.943948

18 May 1988 A Study Of Porous Cordierite As A Potential Candidate For VLSI Dielectric Substrates

R G Thompson, J Shyu, J C Poret, C Buckhalt, D L Shealy, H T Tohver

Proceedings Volume 0877, Micro-Optoelectronic Materials; (1988) https://doi.org/10.1117/12.943948
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Porous substrates of a low dielectric constant (K) ceramic such as cordierite offer the opportunity to produce substrates with very low composite K values. This is attractive in VLSI packages because a low K allows the package to operate at higher frequencies. However, the porosity causes problems with conduction line integrity and thermal conductivity. These problems could be relieved somewhat if the pores were filled with a second phase such as glass. Various mixing laws are available to predict the resultant K value in a two phase mixture and these have been applied with some success. The research reported here involves a quantitative analysis of the volume fraction of porosity and pore size distribution in several cordierite compositions processed in various ways. These data are correlated with measurements of density and dielectric constant. They are also compared to several mixing laws to evaluate the relative fit between quantitative volume fraction measurements and density measurements. Finally, the results of this research are analyzed with respect to other recent research on porous substrate ceramics to identify the direction for future work.

Citation Download Citation

R G Thompson, J Shyu, J C Poret, C Buckhalt, D L Shealy, and H T Tohver "A Study Of Porous Cordierite As A Potential Candidate For VLSI Dielectric Substrates", Proc. SPIE 0877, Micro-Optoelectronic Materials, (18 May 1988); https://doi.org/10.1117/12.943948

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