12 July 1988 Industrial Excimer Lasers: Continous Operation And Proven Applications
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Proceedings Volume 0894, Gas Laser Technology; (1988) https://doi.org/10.1117/12.944382
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
Recent tests confirm that commercially available excimer lasers meet most industrial requirements including the most strenuous - continuous constant power operation at maximum specified power ratings. Test results include lifetime data plus the determination of maintenance and operating costs. A few proven industrial applications are reviewed as well as the field experience on their production lines. The field and test data compare favorably.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lindsay Austin, Lindsay Austin, Dirk Basting, Dirk Basting, Hans-Jurgen Kahlert, Hans-Jurgen Kahlert, Wolfgang Muckenheim, Wolfgang Muckenheim, Ulrich Rebhan, Ulrich Rebhan, } "Industrial Excimer Lasers: Continous Operation And Proven Applications", Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); doi: 10.1117/12.944382; https://doi.org/10.1117/12.944382
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