12 July 1988 Acoustic Microscopy
Author Affiliations +
Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944528
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Acoustic microscopy has been growing steadily since the development of the first microscope in the mid-seventies. Since that date, acoustic microscopes have been used as both qualitative tools for imaging, and quantitative tools for the characterization of materials. The frequency range, and thus resolution, of acoustic microscopes covers several decades which makes the methodology useful for examining materials with spatial resolutions ranging from millimeters to Angstroms. In this paper, we will review the principle of operation of the microscope, show some imaging results, and present some quantitative measurements of samples using both amplitude only and amplitude and phase measuring microscopes. We will also show some recent results of quantitative measurements of anisotropy and surface residual stress that are possible with new types of lenses.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B T Khuri-Yakub, B T Khuri-Yakub, } "Acoustic Microscopy", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944528; https://doi.org/10.1117/12.944528

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