12 July 1988 Externally Pressurised Bearings For Systems Leading To Nanometer Technology
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Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944534
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
This paper discusses the reasons for applying fluid film bearings in high precision applications. The information presented shows how these bearings can be designed to yield maximum and constant film stiffness in the mid-position or alternatively increasing stiffness as the bearing departs from the mid position. Design features to minimise transmitted noise in bearings are described to enable the designer to produce a mechanically quiet system. The data presented is related to both gas and liquid fed bearings. The design data presented is limited to journal bearings due to limitations of time to compute the charac-teristics of flat pad bearings. The general design criteria however applies to both flat pad and journal bearings.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K J Stout, K J Stout, M Tawfik, M Tawfik, "Externally Pressurised Bearings For Systems Leading To Nanometer Technology", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944534; https://doi.org/10.1117/12.944534
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