12 July 1988 Magnetic Bearings For Precision Linear Slides
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Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944535
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Early uses of scanning tunneling microscopes indicate that many areas of science could greatly benefit if centimeter scale objects could be probed on an atomic scale. This could be accomplished by the development of a linear slide having one Angstrom resolution and a one-tenth meter range of travel. Magnetic suspension technology has been proposed as an ideal candidate for the suspension of thee linear slide. This technology is attractive since it combines low noise, excellent positioning accuracy, zero wear, and requires no lubrication. The paper examines the feasibility of developing a magnetic suspension with a required resolution exceeding one Angstrom and establishes the requirements for this suspension. The achievable resolution is shown to be determined by position measurement accuracy, suspension gain, suspension bandwidth, and disturbance force levels. Expected disturbance force levels from ground motion, air currents, and acoustic effects are projected. Given the expected disturbance force levels, measurement accuracy, and required controller performance, a magnetic suspension could be developed which would provide resolution better than the one Angstrom required.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David B Eisenhaure, David B Eisenhaure, Alexander Slocun, Alexander Slocun, Richard Hockney, Richard Hockney, } "Magnetic Bearings For Precision Linear Slides", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944535; https://doi.org/10.1117/12.944535


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