12 July 1988 Scanning Capacitance Microscopy
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Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944526
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
Scanning capacitance microscopy is a mechanically scanned microscopy which uses variations in the capacitance between the sample and a scanning tip as a probe of sample topography. In this paper we discuss the theory of the capacitance probe and its application to scanning capacitance microscopy and fringe field profilometry .
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J R Matey, J R Matey, } "Scanning Capacitance Microscopy", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944526; https://doi.org/10.1117/12.944526
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