12 July 1988 Thermal And Photothermal Imaging On A Sub 100 Nanometer Scale
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Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944530
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
A review is made of progress in high resolution near field thermal imaging. The Scanning Thermal Profiler, initially demonstrated as a surface profiler, has profiled aluminum films with sub 100 nanometer resolution. More recently, the thermal sensor has been used to map current induced heating of a surface with comparable resolution. Finally, photothermal imaging of laser heated surfaces has been demonstrated, with image structure well below 100 nanometers.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C C Williams, C C Williams, H K Wickramasinghe, H K Wickramasinghe, } "Thermal And Photothermal Imaging On A Sub 100 Nanometer Scale", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944530; https://doi.org/10.1117/12.944530
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