Optical Constants For 22 Thin Film Materials In The 10 eV To 500 eV Photon Energy Region

D L Windt; VV Cash; M Scott; P Arendt; B Newnam; R F Fisher; A B Swartzlander; P Z Takacs; J M Pinneo; J B Kortright

doi:10.1117/12.945484

11 July 1988 Optical Constants For 22 Thin Film Materials In The 10 eV To 500 eV Photon Energy Region

D L Windt, VV Cash, M Scott, P Arendt, B Newnam, R F Fisher, A B Swartzlander, P Z Takacs, J M Pinneo, J B Kortright

Proceedings Volume 0911, X-Ray and Vacuum Ultraviolet Interaction Data Bases, Calculations, and Measurements; (1988) https://doi.org/10.1117/12.945484
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Reflectance measurements were used to derive the optical constants of 22 materials for 36 photon wavelengths from 24 Å to 1216 Å. The samples studied are thin films of the transition metals Ti, Zr, Nb, Mo, Ru, Rh, Pd, Hf, Ta, W, Re, Os, Ir, and Pt, the noble metals Ag and Au, and films of C, diamond, Al, Si, CVD-SiC and a-SiC. We describe the experiment and also the data reduction technique used to derive the optical constants from the reflectance versus incidence angle data. A summary of the results is presented.

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D L Windt, VV Cash, M Scott, P Arendt, B Newnam, R F Fisher, A B Swartzlander, P Z Takacs, J M Pinneo, and J B Kortright "Optical Constants For 22 Thin Film Materials In The 10 eV To 500 eV Photon Energy Region", Proc. SPIE 0911, X-Ray and Vacuum Ultraviolet Interaction Data Bases, Calculations, and Measurements, (11 July 1988); https://doi.org/10.1117/12.945484

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