Novolacs With Alternating P-Cresol & Polyhydroxyphenyl Monomer Units: Developer Cationic Effects And Thermal Properties

Andrew J. Blakeney; Alfred T. Jeffries III; John J. Wehrle; Wesley M. Gardner

doi:10.1117/12.968334

1 January 1988 Novolacs With Alternating P-Cresol & Polyhydroxyphenyl Monomer Units: Developer Cationic Effects And Thermal Properties

Andrew J. Blakeney, Alfred T. Jeffries III, John J. Wehrle, Wesley M. Gardner

Author Affiliations +

Proceedings Volume 0920, Advances in Resist Technology and Processing V; (1988) https://doi.org/10.1117/12.968334
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

Novolacs which alternate p-cresol monomer units with polyhydroxyphenyl monomer units have been synthesized by acid catalyzed condensation of 2,6-bis(hydroxymethyl)-p-cresol with polyhydroxybenzenes such as resorcinol or 4-chlororesorcinol. These novolacs are highly alkaline soluble and exhibit improved glass transition temperatures relative to conventional novolacs. Unexpected developer cation effects have been observed on the dissolution times of some of these novolacs. The effect of molecular weight on these effects will be discussed for one system. The dissolution discrimination and inhibition of a 4- chlororesorcinol containing novolac was examined relative to a standard m-,p-cresol novolac and polyvinyl phenol. Images produced from a resist using a p-cresol/ 4-chlororesorcinol novolac showed no significant image degradation at 200 degrees C.

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Andrew J. Blakeney, Alfred T. Jeffries III, John J. Wehrle, and Wesley M. Gardner "Novolacs With Alternating P-Cresol & Polyhydroxyphenyl Monomer Units: Developer Cationic Effects And Thermal Properties", Proc. SPIE 0920, Advances in Resist Technology and Processing V, (1 January 1988); https://doi.org/10.1117/12.968334

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