1 January 1988 Study Of The Reaction Kinetics Of The Photoresist Aging Process
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Abstract
The aim of this work was to determine the effect of aging on absorption, thickness and dissolution characteristics of precoated photoresist blanks. Experimental results indicate that the aging of photoresist involves bleaching and darkening reactions. The temperature dependency of these reactions follow the Arrhenius Law.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thiloma Perera, Michael P. C. Watts, "Study Of The Reaction Kinetics Of The Photoresist Aging Process", Proc. SPIE 0920, Advances in Resist Technology and Processing V, (1 January 1988); doi: 10.1117/12.968317; https://doi.org/10.1117/12.968317
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