1 January 1988 Characterization Of Process Variability Using Robust Data Summaries
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Abstract
A data summation method is described that employs summary statistics that are relatively insensitive ("robust") to the presence of spurious observations ("outliers"). The method is quick; it is accurate both with and without outliers present; and it is simple for users to understand. It is then shown that these summary statistics can be used to construct variance component estimators, key tools in process improvement and control. The estimators presented are simpler than the conventional variance component estimators and have significantly smaller data storage requirements.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael S. Mahaney, Michael S. Mahaney, G. Rex Bryce, G. Rex Bryce, } "Characterization Of Process Variability Using Robust Data Summaries", Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); doi: 10.1117/12.968375; https://doi.org/10.1117/12.968375
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