1 January 1988 New 5X i-Line Projection Aligner For VLSI Fabrication
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A new i-line projection aligner, the LD-5010i, has been developed and has two primary features : good patterning ability and good overlay accuracy. In this paper, performance of the i-line projection system and the characteristic alignment method, called the two-wavelength detection, are described.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shuji Sugiyama, Shuji Sugiyama, Tsutomu Tawa, Tsutomu Tawa, Yoshitada Oshida, Yoshitada Oshida, Toshiei Kurosaki, Toshiei Kurosaki, Fumio Mizuno, Fumio Mizuno, } "New 5X i-Line Projection Aligner For VLSI Fabrication", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); doi: 10.1117/12.968429; https://doi.org/10.1117/12.968429


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