1 January 1988 Through-The-Lens Automatic Focusing And Leveling In An Advanced Mask Stepper
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Abstract
Design, mechanization and performance of a through-the-lens focus control system now in use by the mask-making facility at the IBM Essex Junction facility on their most advanced step-and-repeat cameras are discussed.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. H. Burbo, "Through-The-Lens Automatic Focusing And Leveling In An Advanced Mask Stepper", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); doi: 10.1117/12.968401; https://doi.org/10.1117/12.968401
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