Design Consideration Of A Radiation Cooled Slotted Rotating Target X-Ray Source

S Hattori; M Asano; T Tagawa; S Yoshikawa

doi:10.1117/12.945647

14 June 1988 Design Consideration Of A Radiation Cooled Slotted Rotating Target X-Ray Source

S Hattori, M Asano, T Tagawa, S Yoshikawa

Proceedings Volume 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII; (1988) https://doi.org/10.1117/12.945647
Event: Medical Imaging II, 1988, Newport Beach, CA, United States

Abstract

A practical design of 0.1 cm diameter, 10 KW e-beam power, point x-ray source with v-shaped slotted rotating target is discussed. This point x-ray source can give penumbra--2 intra-wafer-distortion trade-off resolution of 0.13 pm and inverse-throughput for 25cm^-2 sensitivity resist of 1.8 s•cm-1. Temporal temperature rise for 7 cm slot radius and 50 s-1 revolution remain within 260 °C. Effect of radiation cooling by stacked fins are calculated. Thus estimate average temperature rise amounts to 490°C over cooling temperature. Estimated temperature rise of rotating axis is 300 °C. Effect of stacked fins as evacuation resistance is also discussed. We can maintain e-beam chamber within 10^-8 torr by using fero-fluidic seal working at 10-8 torr condition.

Citation Download Citation

S Hattori, M Asano, T Tagawa, and S Yoshikawa "Design Consideration Of A Radiation Cooled Slotted Rotating Target X-Ray Source", Proc. SPIE 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, (14 June 1988); https://doi.org/10.1117/12.945647

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