High Density Schottky-Barrier Infrared Image Sensor

Masafumi Kimata; Masahiko Denda; Naoki Yutani; Shuhei Iwade; Natsuro Tsubouchi

doi:10.1117/12.946624

15 August 1988 High Density Schottky-Barrier Infrared Image Sensor

Masafumi Kimata, Masahiko Denda, Naoki Yutani, Shuhei Iwade, Natsuro Tsubouchi

Proceedings Volume 0930, Infrared Detectors and Arrays; (1988) https://doi.org/10.1117/12.946624
Event: 1988 Technical Symposium on Optics, Electro-Optics, and Sensors, 1988, Orlando, FL, United States

Abstract

In recent years silicide Schottky-barrier focal plane technology has received great interest because it is the most promising technology for high density infrared image sensors. However, improvement in not only the detector performance but also the readout architecture is indispensable for realizing high density infrared image sensors. This paper presents the advances in silicide Schottky-barrier focal plane technology and the design considerations for high resolution infrared image sensors with video quality. A 512x512-element platinum silicide Schottky-barrier infrared image sensor with a novel readout architecture is also described.

Citation Download Citation

Masafumi Kimata, Masahiko Denda, Naoki Yutani, Shuhei Iwade, and Natsuro Tsubouchi "High Density Schottky-Barrier Infrared Image Sensor", Proc. SPIE 0930, Infrared Detectors and Arrays, (15 August 1988); https://doi.org/10.1117/12.946624

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