4 August 1988 Adaptation Of A WYKO LADITE Interferometer To Another Wavelength
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Abstract
The software and computing power of the WYKO LADITE interferometer make it a desirable tool in applications that are outside the factory set wavelength. However, the focus shift involved in going from the factory set wavelength to, for example, Nd:YAG's 1.06 micron line introduces systematic errors. This paper describes a method to refocus the commercially available instrument without compromising measurement accuracy. This modification allowed testing of a high quality laser system at its operational wavelength.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jay H. Lowry, Jay H. Lowry, John H. Belk, John H. Belk, } "Adaptation Of A WYKO LADITE Interferometer To Another Wavelength", Proc. SPIE 0941, Automated Testing of Electro-Optical Systems, (4 August 1988); doi: 10.1117/12.947182; https://doi.org/10.1117/12.947182
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