16 August 1988 Nanofabrication Of Quantum Coupled Devices
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Proceedings Volume 0945, Advanced Processing of Semiconductor Devices II; (1988) https://doi.org/10.1117/12.947402
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States
A new generation of integrated circuits is foreseen in which quantum dots with discrete electronic states are used to construct logic and memory elements. Successful implementation of this technology will require significant improvements in semiconductor processing technology.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. N. Randall, M. A. Reed, R. J. Matyi, T. M. Moore, R. J. Aggarwal, A. E. Wetsel, "Nanofabrication Of Quantum Coupled Devices", Proc. SPIE 0945, Advanced Processing of Semiconductor Devices II, (16 August 1988); doi: 10.1117/12.947402; https://doi.org/10.1117/12.947402


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