Optical Measurement Of Built-In And Applied Electric Fields In AlxGa1_xAs/GaAs Heterostructures

Paul G. Synder; Kenneth G. Merkel; John A. Woollam

doi:10.1117/12.947417

9 August 1988 Optical Measurement Of Built-In And Applied Electric Fields In Al_xGa_1-xAs/GaAs Heterostructures

Paul G. Synder, Kenneth G. Merkel, John A. Woollam

Proceedings Volume 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III; (1988) https://doi.org/10.1117/12.947417
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

Variable angle spectroscopic ellipsometry (VASE) is used to study the built-in electric fields in AlxGa1-xAs/GaAs heterostructures. VASE data, obtained with no electrical contacts on the sample, contain Franz-Keldysh (FK) lineshapes at the AlGaAs bandgap energy, which are due to the built-in field across the buried AlGaAs layer. Analysis of the lineshapes, using the FK theory together with a multilayer model, yields the approximate field profile in the layer. This, combined with a numerical solution of Poisson's equation, provides the approximate doping concentration. In addition, measurements made on samples with electrical contacts are described.

Citation Download Citation

Paul G. Synder, Kenneth G. Merkel, and John A. Woollam "Optical Measurement Of Built-In And Applied Electric Fields In Al_xGa_1-xAs/GaAs Heterostructures", Proc. SPIE 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III, (9 August 1988); https://doi.org/10.1117/12.947417

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