23 August 1988 High Tc Superconducting Thin Films And Devices Made From YBa2Cu3Oy
Author Affiliations +
Proceedings Volume 0948, High-Tc Superconductivity: Thin Films and Devices; (1988) https://doi.org/10.1117/12.947463
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States
We have used both electron-beam vapor deposition and sputtering systems to deposit superconducting thin films of the compound YBa2Cu30y. In the e-beam deposition system the three metals are individually evaporated in an oxygen partial pressure while the sputtering system uses composite targets. After a high temperature furnace anneal in flowing oxygen these films can have transition temperatures as high as 91 K. The films in thicknesses ranging from 0.07 to several microns are deposited on a variety of substrates such as alumina, Si, MgO, zirconia and SrTiO3. The epitaxial films which are grown on polished SrTiO3 single crystals generally show the highest critical current density, around 101A/cm2 observed at 4 K. Device applications of these films such as SQUIDs and transmission lines will be discussed with particular reference to the processing and patterning techniques used in their fabrication. These techniques include photo-and e-beam lithography, ion implantation and milling and laser ablation.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert B. Laibowitz, Robert B. Laibowitz, Roger H. Koch, Roger H. Koch, } "High Tc Superconducting Thin Films And Devices Made From YBa2Cu3Oy", Proc. SPIE 0948, High-Tc Superconductivity: Thin Films and Devices, (23 August 1988); doi: 10.1117/12.947463; https://doi.org/10.1117/12.947463


Very large area YBa2 Cu3O7-delta film deposition
Proceedings of SPIE (July 04 1996)
Preparation Of High Tc And Jc Films Of Ba2YCu3O7_8 By...
Proceedings of SPIE (August 22 1988)
Fast infrared response of YBCO thin films
Proceedings of SPIE (September 30 1990)

Back to Top