21 September 1988 Reflective Channel Waveguide Integrated Optic Components In Ti: LiNbO3 By Ion-Beam Micromachining
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Proceedings Volume 0949, Fibre Optics '88; (1988) https://doi.org/10.1117/12.947523
Event: Sira/Fibre Optics '88, 1988, London, United Kingdom
Abstract
Focussed ion beam micromachining is a new maskless process that may be used to fabricate deep (>10 µm) features in LiNb03. This is advantageous, because LiNb03 is difficult to etch selectively otherwise. Features in the form of trenches, cut accurately orthogonal to titanium-diffused channel waveguides, may be used as rugged on-chip mirrors for channel waveguide integrated optics. These may be combined with other waveguide components to form direct reflectors, reflective bends, and electro-optically switchable track-changing reflectors. Experimental data on all three devices are given.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. R. A. Syms, R. R. A. Syms, R. E. J. Watkins, R. E. J. Watkins, M. Robinson, M. Robinson, } "Reflective Channel Waveguide Integrated Optic Components In Ti: LiNbO3 By Ion-Beam Micromachining", Proc. SPIE 0949, Fibre Optics '88, (21 September 1988); doi: 10.1117/12.947523; https://doi.org/10.1117/12.947523
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