16 January 1988 Laser Excited Synthesis Of Sub-Micron Powders
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Proceedings Volume 0952, Laser Technologies in Industry; (1988) https://doi.org/10.1117/12.968919
Event: Laser Technologies in Industry, 1988, Porto, Portugal
The laser activated synthesis of silicon and silicon nitride powders has been studied using gaseous reactants. The use of non-IR-absorbing, chlorinated silanes requires the application of a sensitizer, which transfers the thermal energy to the reactants. The influence of the sensitizer sulphur hexafluoride on the laser activated reactions of dichloro silane and silicon tetrachloride in the presence of ammonia has been studied.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. G. M. Becht, J. G. M. Becht, B. A. Bauer, B. A. Bauer, P. J. van der Put, P. J. van der Put, J. Schoonman, J. Schoonman, B. Scarlett, B. Scarlett, } "Laser Excited Synthesis Of Sub-Micron Powders", Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); doi: 10.1117/12.968919; https://doi.org/10.1117/12.968919

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