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The aim of this paper is not to give a long and tedious description of all the optical methods used in metrology, but to draw some general specific propertters and ideas illustrated by representative applications. Impact of non-linear optics, optical waveguides and holographic optical elements are selected fields for this review.
Jean Ebbeni
"Overview Of Optical Methods In Metrology", Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); https://doi.org/10.1117/12.968814
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Jean Ebbeni, "Overview Of Optical Methods In Metrology," Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); https://doi.org/10.1117/12.968814