16 January 1988 Physical Backgrounds Of Laser Inspection Of Surface Roughness
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Proceedings Volume 0952, Laser Technologies in Industry; (1988) https://doi.org/10.1117/12.968855
Event: Laser Technologies in Industry, 1988, Porto, Portugal
We present the physical backgrounds of contactless optical inspection of (rough) surfaces by means of scattering of laser light from these surfaces.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. A. Ferwerda, H. A. Ferwerda, } "Physical Backgrounds Of Laser Inspection Of Surface Roughness", Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); doi: 10.1117/12.968855; https://doi.org/10.1117/12.968855

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