16 January 1989 An Improved Fourier Transform Profilometry
Author Affiliations +
Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947595
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States
Abstract
An improved Fourier transform profilometry for the automatic mesurement of 3-D object shapes is presented. Because of using a defocused Rouchi grating to get a qusi-sinusoidal optical field and using grating π-phase shifting technique, the fundarmental spectrum modulated by 3-D object shapes can be extended from 0 to 2f. theorily Cf. is the carrier frequency of the optical field). Consequently,the measurable rate of hight variation can be extended three times more than the unimproved FTP. This article gives the theory and experiment results of the improved FTP.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xian-Yu Su, Xian-Yu Su, Jian Li, Jian Li, Lu-Rong Guo, Lu-Rong Guo, Wan-Yong Su, Wan-Yong Su, } "An Improved Fourier Transform Profilometry", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947595; https://doi.org/10.1117/12.947595
PROCEEDINGS
5 PAGES


SHARE
Back to Top