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16 January 1989 Comparison Of Optical And Mechanical Measurements Of Surface Finish
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Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947589
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States
Abstract
Improved signal processing procedures have been developed for determining surface microtopography from interference microscopy. These are illustrated by comparing the finish of a precision-machined surface measured with the research Linnik microscope at Imperial College with corresponding results obtained using the digitized Talystep at the National Bureau of Standards. Excellent agreement is obtained.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. L. Church, J. C. Dainty, D. M. Gale, and P. Z. Takacs "Comparison Of Optical And Mechanical Measurements Of Surface Finish", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947589
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