This paper describes a commercial optical profilometer, the UB 60, and several of its industrial applications. The operating principle of the instrument is based on the dynamic focussing of a confocal microscope, a technique adapted from known CD player technology. The paper begins with a brief description of the profilometer itself, concentrating on the optical system, and then continues with a brief description of four applications. Finally some encountered measurement problems and their solutions are discussed.
A.J. C. Brown,
"Industrial Applications Of An Optical Profilometer", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947590; https://doi.org/10.1117/12.947590