16 January 1989 Industrial Applications Of An Optical Profilometer
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Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947590
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States
Abstract
This paper describes a commercial optical profilometer, the UB 60, and several of its industrial applications. The operating principle of the instrument is based on the dynamic focussing of a confocal microscope, a technique adapted from known CD player technology. The paper begins with a brief description of the profilometer itself, concentrating on the optical system, and then continues with a brief description of four applications. Finally some encountered measurement problems and their solutions are discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A.J. C. Brown, U. Breitmeier, "Industrial Applications Of An Optical Profilometer", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947590; https://doi.org/10.1117/12.947590
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