16 January 1989 Industrial Applications Of An Optical Profilometer
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Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947590
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States
Abstract
This paper describes a commercial optical profilometer, the UB 60, and several of its industrial applications. The operating principle of the instrument is based on the dynamic focussing of a confocal microscope, a technique adapted from known CD player technology. The paper begins with a brief description of the profilometer itself, concentrating on the optical system, and then continues with a brief description of four applications. Finally some encountered measurement problems and their solutions are discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A.J. C. Brown, A.J. C. Brown, U. Breitmeier, U. Breitmeier, } "Industrial Applications Of An Optical Profilometer", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947590; https://doi.org/10.1117/12.947590
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