Specklegrammetry For Precision Surface Coordinate Measurement

Y. Y. Hung; N. H. Wang; H. Q. Ruan

doi:10.1117/12.947661

14 December 1988 Specklegrammetry For Precision Surface Coordinate Measurement

Y. Y. Hung, N. H. Wang, H. Q. Ruan

Proceedings Volume 0955, Industrial Laser Interferometry II; (1988) https://doi.org/10.1117/12.947661
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

Correlation between two speckle patterns obtained by successive exposures has been extensively studied by many researchers. The correlation coefficient is associated with the roughness of the measured surface, the angular offset of the incident beam between two exposures, and the diffraction distance from the rough surface ( or its image ) to the photographic plate. The correlation degree can be estimated by measuring the contrast of the Young's fringes, in turns, the fringe contrast is used for determining roughness of the measured surface. If the fringe contrast is high enough, the interfringe spacing can be measured, which contains a great deal of information about the surface displacement, the surface rotation and the phase distribution.

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Y. Y. Hung, N. H. Wang, and H. Q. Ruan "Specklegrammetry For Precision Surface Coordinate Measurement", Proc. SPIE 0955, Industrial Laser Interferometry II, (14 December 1988); https://doi.org/10.1117/12.947661

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