24 October 1988 Infrared Study Of Excimer Laser Induced Surface Modification Of Kapton
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Proceedings Volume 0957, Laser Beam Surface Treating and Coating; (1988); doi: 10.1117/12.947709
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States
Abstract
The surfaces of the polyimide Kapton obtained by irradiation with 308 nm pulsed ultraviolet radiation from a XeCI excimer laser in air were studied. DRIFT (Diffuse Reflectance Infrared Fourier Transform) analysis of the processed material indicated an increase in surface area as a result of ablative etching. This was verified through the use of SEM (Scanniig Electron Microscopy) scans of the treated polyimide film. At high fluences (7.8 J/cm ) and high numbers of pulses on the same target area, the infrared spectrum of the sample showed the appearance of broadband absorption between 2000 - 4000 cm-1. This was attributed to the formation of carbonaceous residue on the surface of the film.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Mihailov, W. Duley, "Infrared Study Of Excimer Laser Induced Surface Modification Of Kapton", Proc. SPIE 0957, Laser Beam Surface Treating and Coating, (24 October 1988); doi: 10.1117/12.947709; https://doi.org/10.1117/12.947709
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KEYWORDS
Absorption

Infrared radiation

Scanning electron microscopy

FT-IR spectroscopy

Excimer lasers

Spectroscopy

Ultraviolet radiation

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