24 October 1988 Precision Machining Of Ceramic Materials By Excimer Laser Irradiation
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Proceedings Volume 0957, Laser Beam Surface Treating and Coating; (1988) https://doi.org/10.1117/12.947710
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States
Abstract
Excimer laser radiation with a high energy density was used for structured removal of ceramics. Patterns down to 20 μm over an extended area were generated by mask projection. For the oxides (Al203, ZrO2) a specific removal rate of 0.01 μm/(J/cm2) per pulse was determined above a threshold of 3 J/cm2, and no saturation behavior at higher energy density was observed. Non-oxidic ceramics (SiC, Si3N4, ALN, BN) show saturation at a rate close to 20 J/cm2. The short pulse ensures minimal mechanical and chemical change of the surface layer under irradiation.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. J. Schmatjko, K. J. Schmatjko, G. Endres, G. Endres, U. Schmidt, U. Schmidt, P. H. Banz, P. H. Banz, } "Precision Machining Of Ceramic Materials By Excimer Laser Irradiation", Proc. SPIE 0957, Laser Beam Surface Treating and Coating, (24 October 1988); doi: 10.1117/12.947710; https://doi.org/10.1117/12.947710
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