Sub-Micron Displacement Measurement Repeatability On Precision Machine Tools With Laser Interferometry

Charles R. Steinmetz

doi:10.1117/12.947785

14 November 1988 Sub-Micron Displacement Measurement Repeatability On Precision Machine Tools With Laser Interferometry

Charles R. Steinmetz

Proceedings Volume 0959, Optomechanical and Electro-Optical Design of Industrial Systems; (1988) https://doi.org/10.1117/12.947785
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

Recent advancements in Hewlett-Packard laser interferometers has made it possible to achieve sub-micron displacement measurement repeatability in precision machine tool applications . This will be of key importance in cutting and measuring sub-micron toleranced parts in the future. This measurement repeatability is achieved by the use of two new products that significantly reduce the major error components of the interferometer system. Before discussing the details of these products, an account is given on how to analyze the measurement repeatability of a laser interferometer system. Each component of the system repeatability budget are discussed. From this analysis it is observed that the most significant error components in this budget are due to atmospheric affects and the thermal drift of the optics. The affects of these errors have been reduced on the Hewlett-Packard system by the use of Wavelength Tracking Compensation and a new high stability interferometer.

Citation Download Citation

Charles R. Steinmetz "Sub-Micron Displacement Measurement Repeatability On Precision Machine Tools With Laser Interferometry", Proc. SPIE 0959, Optomechanical and Electro-Optical Design of Industrial Systems, (14 November 1988); https://doi.org/10.1117/12.947785

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