Rapid, Nonmechanical, Damage-Free Figuring Of Optical Surfaces Using Plasma-Assisted Chemical Etching (PACE): Part I Experimental Results

L. David Bollinger; Charles B Zarowin

doi:10.1117/12.948052

29 January 1989 Rapid, Nonmechanical, Damage-Free Figuring Of Optical Surfaces Using Plasma-Assisted Chemical Etching (PACE): Part I Experimental Results

L. David Bollinger, Charles B Zarowin

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Proceedings Volume 0966, Advances in Fabrication and Metrology for Optics and Large Optics; (1989) https://doi.org/10.1117/12.948052
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

We present experimental results of an ongoing investigation demonstrating that Plasma Assisted Chemical Etching (PACE) can rapidly and controllably figure and smooth optical surfaces without mechanical contact; thus, removing the constraints on the design of optical elements imposed by mechanical processes, and, allowing higher quality optical surfaces. This process employs a plasma etch process originally developed to pattern micro-electronic circuits by etching through a relatively non-erodable lithographically patterned mask. The PACE process shapes the optical surface by removing material in a small area under a confined reactive gas plasma moved over the surface. Rates of removal as high as 10 m per minute are obtainable with accurate control. The removal footprint can be varied during the process. PACE inherently smooths or polishes while removing material, exposing a virgin surface free of process generated contamination and subsurface damage. Although other materials can also be figured by a PACE process, for this study, apparatus and processes were developed to explore the figuring of fused silica. Results will be shown demonstrating: repeatability and control of removal rate and footprint; predictability of material removal with plasma "tool" motion; and smoothing.

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L. David Bollinger and Charles B Zarowin "Rapid, Nonmechanical, Damage-Free Figuring Of Optical Surfaces Using Plasma-Assisted Chemical Etching (PACE): Part I Experimental Results", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948052

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