Scanning CO2 Laser Interferometer For The Inspection Of Infrared Transmitting Plane Parallel Plates

B. Dischler; P. Koidl

doi:10.1117/12.948063

29 January 1989 Scanning CO₂ Laser Interferometer For The Inspection Of Infrared Transmitting Plane Parallel Plates

B. Dischler, P. Koidl

Proceedings Volume 0966, Advances in Fabrication and Metrology for Optics and Large Optics; (1989) https://doi.org/10.1117/12.948063
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

A scanning CO₂ laser interferometer is described, in which the test sample itself forms the interference cavity. Results for plane parallel plates of germanium and of galliumarsenide are presented and discussed. Samples with perfectly plane surfaces allow to evaluate the uniformity of the refractive index across the sample.

Citation Download Citation

B. Dischler and P. Koidl "Scanning CO₂ Laser Interferometer For The Inspection Of Infrared Transmitting Plane Parallel Plates", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948063

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