Surface Profile Error Measurement For Small Rotationally Symmetric Surfaces

Russ Palum

doi:10.1117/12.948059

29 January 1989 Surface Profile Error Measurement For Small Rotationally Symmetric Surfaces

Russ Palum

Proceedings Volume 0966, Advances in Fabrication and Metrology for Optics and Large Optics; (1989) https://doi.org/10.1117/12.948059
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

The precision machine tool industry has developed processes that produce rotationally symmetric surfaces, both spheres and aspheres, with form errors on the order of 5 microinches (1/5 wave or 0.125 p.m). Precisionmachined diamondturned surfaces can have surface finishes better than 100 angstroms Ra; these surfaces may be intended to be used as an optic, or the surface may be intended to be used to meet a mechanical requirement. Regardless of their intended use, surfaces of this quality can be tested using optical test techniques such as interferometry. This paper reviews the advantages and disadvantages of the methods that have been used to measure aspheric surfaces in the Aspheric Technology department of Kodak Apparatus Division. These techniques include Fizeau and Williams interferometry, holography, stylus and optical profilometry, and null correctors.

Citation Download Citation

Russ Palum "Surface Profile Error Measurement For Small Rotationally Symmetric Surfaces", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948059

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