29 January 1989 The Use Of An Optical Reference Flat To Map The Slide Position Errors Of A Coordinate Measuring Machine
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Abstract
A system to measure the static geometric slide errors of a Coordinate Measuring Machine is described. The system uses a 36" x 36" optical reference flat and four plane mirror interferometers to measure the six possible components of rigid-body motion of the machine probe relative to the machine table. Multiple traces are taken in each of the 3 axis directions to produce a map over the measurement volume. Error compensation techniques based on the interpolation between traces to enhance accuracy are discussed. An auxiliary method is described which is used to measure slide axis squareness. The error map is then adjusted for slide squareness. The control or compensation of sources of non-repeatability and its impact on mapping and compensation accuracy is also discussed.
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R. M. Pardue, J. B. Arnold, "The Use Of An Optical Reference Flat To Map The Slide Position Errors Of A Coordinate Measuring Machine", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); doi: 10.1117/12.948066; https://doi.org/10.1117/12.948066
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