Very High Resolution Profiler For Diamond Turning Groove Analysis

Steven R Lange

doi:10.1117/12.948061

29 January 1989 Very High Resolution Profiler For Diamond Turning Groove Analysis

Steven R Lange

Proceedings Volume 0966, Advances in Fabrication and Metrology for Optics and Large Optics; (1989) https://doi.org/10.1117/12.948061
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Recent advances to the WYKO TOPO-2D and TOPO-3D surface profilers provide new analysis techniques for the measurement of diamond turned surfaces. Very high spatial resolution is made possible by the introduction of a phase shifting Linnik interference microscope objective where spatial resolutions less than 0.5 μm and height resolutions of less than 0.01 nm are possible. Additional new software has been developed to analyze localized slopes, power spectrum, and roughness along and perpendicular to the lay. Analyses of diamond turned samples measured at 200X are included.

Citation Download Citation

Steven R Lange "Very High Resolution Profiler For Diamond Turning Groove Analysis", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948061

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