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29 January 1989 Very High Resolution Profiler For Diamond Turning Groove Analysis
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Abstract
Recent advances to the WYKO TOPO-2D and TOPO-3D surface profilers provide new analysis techniques for the measurement of diamond turned surfaces. Very high spatial resolution is made possible by the introduction of a phase shifting Linnik interference microscope objective where spatial resolutions less than 0.5 μm and height resolutions of less than 0.01 nm are possible. Additional new software has been developed to analyze localized slopes, power spectrum, and roughness along and perpendicular to the lay. Analyses of diamond turned samples measured at 200X are included.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven R Lange "Very High Resolution Profiler For Diamond Turning Groove Analysis", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948061
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