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5 April 1989 Coherent Heterodyne Scatterometer
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Abstract
An instrument has been developed that uses coherent optical heterodyne detection to measure the magnitude of the bidirectional scattering distribution function (BSDF). This instrument offers large dynamic range, high angular resolution and high sensitivity.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Z. Gacusan, S L. Kwiatkowski, B J. Sullivan, and J J Snyder "Coherent Heterodyne Scatterometer", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948102
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