5 April 1989 Laser Scatterometer
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Abstract
We research and manufacture an instrument for measuring surface scattering and roughness of supersmooth surfaces. It can be used not only for measuring opaque sample but also for measuring transparent sample.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yi-Sheng Chen, Yi-Sheng Chen, Wen-Gui Wang, Wen-Gui Wang, } "Laser Scatterometer", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); doi: 10.1117/12.948104; https://doi.org/10.1117/12.948104
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