5 April 1989 Performance Of A Fully Automated Scatterometer For BRDF And BTDF Measurements At Visible And Infrared Wavelengths
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Abstract
The general performance of the FASCAT (Fully Automated Scatterometer) at Martin Marietta shows that the instrument can make rapid, accurate BRDF (Bidirectional Reflectance Distribution Function) and BTDF (Bidirectional Transmittance Distribution Function) measurements of optical surfaces over a range of approximately ten orders of magnitude (103 to 10-7) in BRDF. These measurements can be made for most surfaces even with the detector at the specular angle because of beam attenuation techniques. Helium-neon and CO, lasers are used as sources in conjunction with a reference detector and chopper. The instrument is controlled by an IBM XT computer, which is also used for data storage. The sample's multiple plane positioning and the detector position angle are controlled by high precision computer driven motor drivers. A gold sample is automatically measured before the sample measurement. An innovative menu system makes the operation of the instrument possible with minimal training.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Scot Anderson, Scot Anderson, Stephen M. Pompea, Stephen M. Pompea, Donald F. Shepard, Donald F. Shepard, Raymond Castonauay, Raymond Castonauay, } "Performance Of A Fully Automated Scatterometer For BRDF And BTDF Measurements At Visible And Infrared Wavelengths", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); doi: 10.1117/12.948100; https://doi.org/10.1117/12.948100
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